The method allows to obtain images of surface of samples (including the non-conductive samples) using both cantilevers and Q-plus sensors. In the latter mode STM images can be obtained sumultaneously with AFM imaging with atomic resolution.

The origin of Auger electron spectroscopy (AES) is measurement of energy and intensity of Auger electrons emitted from the sample surface when it is bombarded with a beam of electrons. An important feature of the Auger electron spectroscopy is its sensitivity to chemical state of analyzed elements on the surface. The chemical state of elements of the sample affects the shape and position of features of the spectrum of the Auger electrons.

Ion scattering spectroscopy (ISS) is a technique in which a beam of primary ions is scattered by a surface. The kinetic energy of scattered ions is measured. Energy losses depend on the relative masses of the surface atoms and ions, thereby measured spectrum contains information about elemental composition.

Method of LEED provides information about single crystal structure of the sample surface.

The method allows examine emission spectrum in wavelength range from vacuum ultraviolet to the infrared. Source of low-energy electrons is used to excite the luminescence spectra in gas phase, the source of high-energy electrons is used to excite luminescence spectra of nanocomplexes on a surface of solids.

Electron energy-loss spectroscopy is a kind of electronic spectroscopy, when investigated surface irradiated by electrons with a narrow range of energies, and losses of energy of inelastically scattered electrons are recorded. Distribution of electron energies carries information about energy loss due to excitation of vibrational states, plasmons, deep levels and interband transitions.

Time-of-flight mass spectrometry (TOFMS) is a method of mass spectrometry in which an ion's mass-to-charge ratio is determined via a time measurement. Using a reflector leads to a significant increase in resolution time-of-flight devices in compare with linear increases spectrometers and to an increase of mass determination accuracy. Selection of ionization source depends on substance state before ionization. Ionization is possible by electron impact or by laser radiation (photoionization).

The method allows to obtain an image of the sample surface by scanning with focused electron beam (up to 95 nm and 10 keV) with simultaneous recording of low-energy secondary electrons, excited by this beam.

These methods allow to obtain images of surface with atomic resolution, energy spectra of occupied and unoccupied states, distribution of work function and local density of states with high lateral resolution.

The method of photoelectron spectroscopy with angular resolution is widely used for measuring of dispersions and symmetry of electron energy bands of solid state.