Spectral ellipsometry complex Ellipse 1891 SAG

Spectral ellipsometry complex "Ellipse 1891 SAG" (wavelength range 350-1000 nm) is designed for precision measurements of the thickness of single-layer and multilayer thin-film structures, as well as investigation of the spectral optical constants (refractive index and absorption coefficient), the structural material properties (porosity, the presence of, and the concentration distribution of impurities in the film) over the entire spectral range.

The basis of the complex high-speed static scheme laid ellipsometric measurements . Algorithms for signal reading and calculation of operating parameters provide very high sensitivity needed for measurements with high spectral razresheniem.Ispolzovanie new measuring system provides a quick scan of the entire spectrum or individual sections of the spectrum with high spectral resolution.

Benefits

      • versatility coupled with the high efficiency and accuracy;

      • odnoznachnochnostyu calculating ellipsometric paramerov they are measured in the full range of their values ​​(Ψ – from 0 to 90 degrees ; Δ – from 0 to 360 degrees ) with the same accuracy and sensitivity, which allows unambiguous interpretation of measurement results.

Software security is a complete spectral kopleks tool holding different modes of measurement, visualization, simulation and analysis of results.

Additional Features

Spectral ellipsometer may alternatively be mounted on the process chamber (in-situ option).

Technical characteristics