It is a method based on the etching of the sample through polymer mask. Mask is made by laser beam irradiation (wavelength 405 nm) of polymer coating. Minimal object size is 3 mkm.
It is a method based on the etching of the sample through polymer mask. Mask is made by laser beam irradiation (wavelength 405 nm) of polymer coating. Minimal object size is 3 mkm.
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