This is a method of a sample surface nanopatterning based on the etching through polymer mask. Mask is made by rastered focused electron beam irradiation of the PMMA coating. Ultimate object size is several tenths of nanometers.
This is a method of a sample surface nanopatterning based on the etching through polymer mask. Mask is made by rastered focused electron beam irradiation of the PMMA coating. Ultimate object size is several tenths of nanometers.
Select your language
