SIMS is a method based on the analysis of secondary ions masses generated during the sample milling by gallium focused ion beam. Ion masses are detected by quadruple mass-spectrometer with mass resolution down to 1 a.e.m.
SIMS is a method based on the analysis of secondary ions masses generated during the sample milling by gallium focused ion beam. Ion masses are detected by quadruple mass-spectrometer with mass resolution down to 1 a.e.m.
Select your language
