Zeiss AURIGA Laser
Auriga Laser System.
Cross-beam SEM-FIB workstation equipped with laser chamber.
FE-SEM with GEMINI column
1. Spatial resolution
Acceleration voltage Resolution
1 kV 1.9 nm
15 kV 1.0 nm
2. Beam current
4pA - 20 nA
3. Acceleration voltage
0.1-30 kV
Ion column with liquid metal Ga source
1. Spatial resolution
Acceleration voltage Resolution
30 kV 2.5 nm
2. Beam current
1pA - 50 nA
3. Acceleration voltage
1-30 kV
Gas injection system
Solid state laser
Wavelength – 355 nm.
Pulse duration – 4-20 ns.
Pulse frequency – 1-120 kHz.
Power per pulse up to 20 kW.
Focus diameter – 15 mkm.
