"Nanoserf" and "Solar-MN" installations are used for the synthesis of thin films of various compounds (Al2O3, TiO2, ZnO, HfO2, VO2, SnO2 et al.) designed thickness (from angstrom to micrometers) on the surface of flat, "3D" substrates and dispersed materials by Atomic Layer Deposition (ALD).

Nanoserf i Solar

Application fields:  microelectronics, micromechanics, solar cells, optics, optoelectronics, fuel cells, supercapacitors, sensors, etc.

Pressure reactor (autoclave) Berghof BR-300


High pressure reactor Berghof HR allows hydro (Solvay) thermal synthesis of particulate matter at temperatures up to 250°C and pressures up to 200 bar. During the synthesis of possible sampling, inerting, and monitoring of pressure, temperature and stirrer speed.

Microwave station ETHOS 1

ETHOS 1 microwave station (Milestone Inc.) Is used for the gyro (Solvay) thermal synthesis particulate matter, as well as mineralization of samples. Microwave radiation of up to 1,600 watts provides processes conduct at temperatures up to 200°C and pressures up to 100 bar in the reactors (units 10) made of PTFE.

Installing the WS-650Mz-23NPP (Laurell Technologies Corporation) is intended forthe production of films of various compoundsby sprayingthe solution ona rotating substrate(spin-coating). Diameter wafers to 150 mm, the rotational speed to 12,000 rev/min.

Microcompaunder extruder HAAKE Minilab II complete with molding machines and a set of molds allows to produce composite materials based on polymer matrices and shape of these samples of different shapes (bar, dumbbell, cone) for further tests. Maximum temperature of the extruder to 350oC, working pressure up to 1200 bar injection.