Auriga Laser Auriga Laser 2 Auriga Laser 3

Zeiss AURIGA Laser

Auriga Laser System
Cross-beam SEM-FIB workstation equipped with laser chamber

 

FE-SEM with GEMINI column

1. Spatial resolution
Acceleration voltage                 Resolution
1 kV                                              1.9 nm
15 kV                                           1.0 nm

2. Beam current
 4pA - 20 nA

3. Acceleration voltage                 
0.1 – 30 kV

Ion column with liquid metal Ga source

1. .Spatial resolution
Acceleration voltage                 Resolution
30 kV                                            2.5 nm

2. Beam current
 1pA - 50 nA

3. Acceleration voltage                 
1 – 30 kV

Gas injection system

Solid state laser

Wavelength 355 nm
Pulse duration 4-20 ns
Pulse frequency 1 – 120 kHz
Power per pulse up to 20 kW
Focus diameter 15 mkm