The method of photoelectron spectroscopy is a modern method of investigation of occupied electronic states in solids. It is based on the phenomenon of the photoelectric effect: electron in a solid is optically excited by a photon to the unoccupied state. Photoelectron spectroscopy of core levels enables to obtain quantitative information about elemental and chemical composition of the surface area of the samples. Method of elemental mapping of surface is used for study elemental and chemical composition of samples with lateral resolution, the implementation of this method is possible due to the presence of special microchannel plate, which allows to analyze the emitted photoelectrons from a solid body with a spatial resolution.

The method of photoelectron spectroscopy with angular resolution is widely used for measuring of dispersions and symmetry of electron energy bands of solid state.

Method of LEED provides information about single crystal structure of the sample surface.

The origin of Auger electron spectroscopy (AES) is measurement of energy and intensity of Auger electrons emitted from the sample surface when it is bombarded with a beam of electrons. An important feature of the Auger electron spectroscopy is its sensitivity to chemical state of analyzed elements on the surface. The chemical state of elements of the sample affects the shape and position of features of the spectrum of the Auger electrons.

The method allows to obtain an image of the sample surface by scanning with focused electron beam (up to 95 nm and 10 keV) with simultaneous recording of low-energy secondary electrons, excited by this beam.

Ion scattering spectroscopy (ISS) is a technique in which a beam of primary ions is scattered by a surface. The kinetic energy of scattered ions is measured. Energy losses depend on the relative masses of the surface atoms and ions, thereby measured spectrum contains information about elemental composition.

Electron energy-loss spectroscopy is a kind of electronic spectroscopy, when investigated surface irradiated by electrons with a narrow range of energies, and losses of energy of inelastically scattered electrons are recorded. Distribution of electron energies carries information about energy loss due to excitation of vibrational states, plasmons, deep levels and interband transitions.

These methods allow to obtain images of surface with atomic resolution, energy spectra of occupied and unoccupied states, distribution of work function and local density of states with high lateral resolution.

The method allows to obtain images of surface of samples (including the non-conductive samples) using both cantilevers and Qplus sensors. In the latter mode STM images can be obtained sumultaneously with AFM imaging with atomic resolution.

Time-of-flight mass spectrometry (TOFMS) is a method of mass spectrometry in which an ion's mass-to-charge ratio is determined via a time measurement. Using a reflector leads to a significant increase in resolution time-of-flight devices in compare with linear increases spectrometers and to an increase of mass determination accuracy. Selection of ionization source depends on substance state before ionization. Ionization is possible by electron impact or by laser radiation (photoionization).