Scanning electron microscope microanalyzer-SEM -501 B (Philips, The Netherlands) is attached to its base of X-ray spectral analytical complex WEDAX-2A (EDAX, MICROSPEC, USA).

Scanning electron microscope SEM -501 B is designed to study the surface of solid, materials resistant to vacuum. Analytical complex WEDAX-2A consists of energy dispersive X-ray spectral analyzer and EDAX 9100 X-ray spectral analyzer with wavelength dispersive WDX-2A.