System with a focused electron and ion probes QUANTA 200 3D (FIA, the Netherlands), which is mounted on the base of analytical complex Pegasus 4000 (EDAX, USA).

Quanta 200 3D - multifunctional scanning electron microscope with an integrated focused ion beam. The combination of traditional scanning electron microscope (SEM) and focused ion beam (FIB) in one instrument allows us to supplement the three-dimensional analysis of research materials at the nano-level objects.